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UPDATED 1 Sept: The EI library in London is temporarily closed to the public, as a precautionary measure in light of the ongoing COVID-19 situation. The Knowledge Service will still be answering email queries via email , or via live chats during working hours (09:15-17:00 GMT). Our e-library is always open for members here: eLibrary , for full-text access to over 200 e-books and millions of articles. Thank you for your patience.
Micromachines---the big future. A. Eggert. Lubric. Engng., April 1999, 55(4), 19--21.
The Micro Electro Mechanical System (MEMS) is described. It uses modern technology to create tiny machines that are nearly invisible. Mechanisms with microcircuits, sensors, and actuators are contained on one computer chip. They are prepared by a surface micromachining technique involving film deposition, patterning, etching, and then deposition of more films. The standard elements are composed of fine-grain polycrystalline materials. An alternative method of preparation is the LIGA process details of which are described. Some micromachines require lubrication and others do not. Industrial applications for MEMS are discussed. Considerable benefits are predicted in space travel, satellite communications, aircraft, telescopes, telephone lines, and microsurgery. Demands will far exceed the development costs incurred.
Abstract details
Journal title: Lubrication Engineering
Subjects: Mechanical Engineering, Aerospace engineering, Banking, finance and investment, Economics, business and commerce, Aircraft Operation
